International Conference

[2024]

  1. Hwan Kim, Juncheol Bae, and Yangjin Kim, “Surface shape profiling of silicon wafer using machine learning based wavefront sensing from interference patterns,” International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM), Busan, Republic of Korea, July 2024.
  2. Juncheol Bae, Hwan Kim, and Yangjin Kim, “Second harmonic noise decomposition in fringe patterns using deep learning to enhance performance of interferometric measurements,” International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM), Busan, Republic of Korea, July 2024.
  3. Jurim Jeon and Yangjin Kim, “Phase-shifting algorithm using a single interferogram and deep learning,” SPIE Photonics Europe, Strasbourg, France, April 2024.

[2023]

  1. Jurim Jeon, Yangjin Kim, and Naohiko Sugita, “Interferometric profiling of wafer surface using deep learning and two-frame interferometry,” International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN), P-63, Hong Kong, China, November 2023.
  2. Jurim Jeon and Yangjin Kim, “Phase unwrapping method for optical metrology based on deep learning,” Annual Meeting of American Society for Precision Engineering (ASPE), 81, 435-438, Boston, USA, November 2023.
  3. Jurim Jeon, Yangjin Kim, and Naohiko Sugita, “Single-frame phase extraction for measuring geometric properties of optical components based on deep learning,” International Symposium on Measurement Technology and Intelligent Instruments (ISMTII), A059, Seoul, Republic of Korea, September 2023.
  4. Jurim Jeon, Juyoung Yun, Juncheol Bae, Hwan Kim, and Yangjin Kim, “Surface measurement of silicon wafer using phase extraction based on deep learning and Fizeau interferometer,” International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM), A076, Naha, Japan, July 2023.
  5. Hwan Kim, Jurim Jeon, Juncheol Bae, Juyoung Yun, and Yangjin Kim, “Measurement of optical thickness variations of transparent plate by using three surface interferometer during wavelength modulation,” International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM), A613, Naha, Japan, July 2023.
  6. Juncheol Bae, Jurim Jeon, Hwan Kim, Juyoung Yun, and Yangjin Kim, “Design of Gaussian phase-shifting algorithm for surface profile measurement of a silicon wafer,” International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM), A615, Naha, Japan, July 2023.
  7. Hwan Kim, Jurim Jeon, Juncheol Bae, and Yangjin Kim, “Scanning phase-calculation formula for surface profiling of optical flat using Fizeau interferometer,” SPIE Optical Metrology, Proc. SPIE 12618, 12618-83, Munich, Germany, June 2023.
  8. Juncheol Bae, Jurim Jeon, Hwan Kim, Juyoung Yun, and Yangjin Kim, “Development of Gaussian window for the surface profiling of silicon wafer in wavelength-scanning Fizeau interferometer,” SPIE Optical Metrology, Proc. SPIE 12618, 12618-87, Munich, Germany, June 2023.
  9. Jurim Jeon and Yangjin Kim, “A novel phase-extraction method based on deep learning for estimating geometric properties of optical flat,” SPIE Optical Metrology, Proc. SPIE 12618, 12618-88, Munich, Germany, June 2023.
  10. Wonjun Bae, Sangmin Shin, Minsoo Kim, Seungchan Cho, Junghwan Kim, and Yangjin Kim, “Design and assessment of air-bearing spindle of metal matrix composites,” 9th International Conference on Manufacturing, Machine Design and Tribology (ICMDT),  176, Jeju, Republic of Korea, March 2023.
  11. Juncheol Bae, Hwan Kim, Jurim Jeon, and Yangjin Kim, “Surface profiling of silicon wafer using wavelength-scanning Fizeau interferometer and Gaussian window function,” 9th International Conference on Manufacturing, Machine Design and Tribology (ICMDT), 224, Jeju, Republic of Korea, March 2023. (Best Poster Award)
  12. Wonjun Bae and Yangjin Kim, “Flexible phase-extraction formula for simultaneous profiling of thickness and surface of optical flat using Fizeau interferometer,” 9th International Conference on Manufacturing, Machine Design and Tribology (ICMDT), 229, Jeju, Republic of Korea, March 2023.

[2022]

  1. Jurim Jeon, Sungtae Kim, and Yangjin Kim, “Thickness profiling of a large-aperture transparent plate immune to nonlinear errors,” International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN), P-31, Singapore, November 2022.
  2. Hwan Kim, Jurim Jeon, Sungtae Kim, and Yangjin Kim, “Phase-extraction formula for surface profiling of optical flat using wavelength-tuning interferometer,” International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN), P-40, Singapore, November 2022.
  3. Jurim Jeon, Yangjin Kim, Sungtae Kim, and Wonjun Bae, “A novel phase extracting method for thickness profiling of a transparent optical flat,” International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM), A026, Seogwipo, Republic of Korea, July 2022.
  4. Jurim Jeon, Sungtae Kim, and Yangjin Kim, “Interferometric phase-extraction algorithm insensitive to the refractive-index dispersion for the thickness profiling of a transparent plate,” SPIE Photonics Europe, Proc. SPIE 12137, 121370C, Strasbourg, France, April 2022.
  5. Sungtae Kim and Yangjin Kim, “Simultaneous thickness and surface profiling of blank mask using harmonic phase-iterative method and wavelength-scanning interferometry,” SPIE Photonics Europe, Proc. SPIE 12137, 121370D, Strasbourg, France, April 2022.
  6. Jurim Jeon, Sungtae Kim, and Yangjin Kim, “Measurement of highly reflective surface compensating correlated error by sampling window,” SPIE Photonics West, Proc. SPIE 12008, 120080T, San Francisco, USA, January 2022.

[2021]

  1. Jiwon Seo and Yangjin Kim, “Development of phase-modulation algorithm for measurement of transparent plate using wavelength-tuned interferometer,” International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM), A020, Jeju, Republic of Korea, July 2021.
  2. Sungtae Kim, Yangjin Kim, Fuqing Miao, and Seokyoung Ahn, “Surface profiling of silicon wafer using wavelength-tuned phase-shifting interferometry and polynomial window function,” International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM), A021, Jeju, Republic of Korea, July 2021.

[2020]

  1. Jiwon Seo, Wonjun Bae, Yangjin Kim, and Young Hoon Moon, “Simultaneous measurement of optical flats using wavelength-tuned interferometer and fringe analysis,” International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM), 119, Seoul, Republic of Korea, November 2020.
  2. Yangjin Kim, Jiwon Seo, Sungtae Kim, Wonjun Bae, and Mamoru Mitsuishi, “Precision interferometric thickness measurement of optical flat using wavelength tuning Fizeau interferometer,” SPIE Photonics West, Proc. SPIE 11287, 112871D, San Francisco, USA, February 2020.
  3. Wonjun Bae and Yangjin Kim, “Design of a phase-shifting algorithm for interferometric measurement of optical thickness variation,” SPIE Photonics West, Proc. SPIE 11287, 112871I, San Francisco, USA, February 2020.

[2019]

  1. Yangjin Kim and Mamoru Mitsuishi, “Design of polynomial window function for measurement of silicon wafer using wavelength tuning interferometry,” International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM), 425, Da Nang, Vietnam, July 2019.
  2. Yangjin Kim, “Wavelength tuned phase shifting interferometry – Development of phase shifting algorithm,” International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM), 606, Da Nang, Vietnam, July 2019.
  3. Yangjin Kim, Kenichi Hibino, and Mamoru Mitsuishi, “Interferometric precision measurement of highly reflective thin film using wavelength tuning Fizeau interferometry,” SPIE Optics + Optoelectronics, Proc. SPIE 11032, 1103213, Prague, Czech Republic, April 2019.

[2018]

  1. Yangjin Kim, Wonjun Bae, and Sungtae Kim, “Absolute optical thickness measurement of transparent plate using Fourier analysis and unwrapping correlation,” International Symposium on Precision Engineering and Sustainable Manufacturing (PRESM), 227, Sapporo, Japan, July 2018.
  2. Yangjin Kim, Naohiko Sugita, and Mamoru Mitsuishi, “Simultaneous measurement of surface profile and thickness variation of transparent parallel plate using wavelength tuning Fizeau interferometer,” Proc. SPIE 10519, 105191D, San Francisco, USA, January 2018.

[2017]

  1. Yangjin Kim, Naohiko Sugita and Mamoru Mitsuishi, “Measurement of surface and thickness of optical parallel plate using wavelength tuning,” International Symposium on Green Manufacturing and Applications (ISGMA), 512, Gyeongju, Republic of Korea, June 2017. (Young Researcher Award)
  2. Yangjin Kim and Kenichi Hibino, “Precision surface measurement of ITO thin film using wavelength tuning Fizeau interferometer,” 7th International Conference on Manufacturing, Machine Design and Tribology (ICMDT), 97, Jeju, Republic of Korea, April 2017.

[2016]

  1. Toru Kizaki, Yusuke Ito, Shota Tanabe, Yangjin Kim, Naohiko Sugita, and Mamoru Mitsuishi, “Laser-assisted machining of zirconia ceramics using a diamond bur,” 18th CIRP Conference on Electro Physical and Chemical Machining, Proc. CIRP 42, 497–502, Tokyo, Japan, April 2016.
  2. Yangjin Kim, Naohiko Sugita, and Mamoru Mitsuishi, “Surface profile measurement of highly reflective silicon wafer using wavelength tuning interferometer,” SPIE Advanced Lithography, Proc. SPIE 9778, 97783L, San Jose, USA, February 2016.

[2013 ~ 2014]

  1. Kenichi Hibino, Ryohei Hanayama, and Yangjin Kim, “Absolute interferometric test for high numerical-aperture spherical concaves: gravitational effect,” 11th Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI), A11, Tsukuba, Japan, September 2014. (Best Paper Award)
  2. Yangjin Kim, Kenichi Hibino, Naohiko Sugita, and Mamoru Mitsuishi, “Design of new window function of phase extraction algorithm in wavelength tuning Fizeau interferometer,” SPIE Optical Engineering + Applications, Proc. SPIE 9203, 92030Q, San Diego, USA, August 2014.
  3. Yangjin Kim, Kenichi Hibino, Ryohei Hanayama, Naohiko Sugita, and Mamoru Mitsuishi, “Measurement of the surface shape and optical thickness variation of a polishing crystal wafer by wavelength tuning interferometer,” SPIE Photonics Europe, Proc. SPIE 9132, 91320V, Brussels, Belgium, April 2014.
  4. Yangjin Kim, Kenichi Hibino, Naohiko Sugita, and Mamoru Mitsuishi, “Design of the phase-shifting algorithm for the flatness measurement of a mask blank glass,” SPIE Advanced Lithography, Proc. SPIE 9050, 90501W, San Jose, USA, February 2014.
  5. Kenichi Hibino, Yangjin Kim, and Makoto Ito, “Optical testing by absolute length measurement with wavelength tuning interferometer,” 3rd International Topical Meeting on Optical Sensing and Artificial Vision, Proc. AIP Conference 1537, 95–101, Saint Petersburg, Russia, May 2013.
  6. Yangjin Kim, Kenichi Hibino, Kanako Harada, Naohiko Sugita, and Mamoru Mitsuishi, “Excess fraction measurement of a transparent glass thickness in wavelength tuning interferometry,” SPIE Optical Metrology, Proc. SPIE 8788, 878803, Munich, Germany, May 2013.

[~2011]

  1. Yangjin Kim, Chanhong Lee, Jaehak Lee, and Taeho Ha, “Static stiffness tuning method of linear motion guide of machine tool,” 26th Annual Meeting of the American Society for Precision Engineering, 307–310, Denver, USA, November 2011.
  2. Kenichi Hibino, Yangjin Kim, Youichi Bitou, and Sonko Osawa, “Simultaneous measurement of the surface-shape and the absolute optical thickness of a glass parallel by wavelength tuning interferometry,” 9th Japan-Finland Joint Symposium on Optics in Engineering, 46–47, Turku, Finland, September 2011.
  3. Kenichi Hibino, Yangjin Kim, Youichi Bitou, and Mamoru Mitsuishi, “Measurement of absolute optical thickness by wavelength tuning interferometer,” 22nd International Commission for Optics, Proc. SPIE 8011, 80110B, Puebla, Mexico, August 2011.
  4. Yangjin Kim, and Chanhong Lee, “Thermal deformation prediction of concerned point of machine tool,” 4th International Conference on Positioning Technology, 319–322, Busan, Republic of Korea, November 2010.
  5. Yangjin Kim, Kenichi Hibino, Youichi Bitou, Sonko Osawa, Naohiko Sugita, and Mamoru Mitsuishi, “Measurement of absolute optical thickness distribution of semiconductor wafer using a wavelength tuning interferometer,” 10th International Symposium on Measurement and Quality Control, B131–B134, Osaka, Japan, September 2010.
  6. Kenichi Hibino, Yangjin Kim, Youichi Bitou, Sonko Osawa, Naohiko Sugita, and Mamoru Mitsuishi, “Measurement of absolute optical thickness of a mask-glass by wavelength tuning interferometry,” SPIE Optical Engineering + Applications, Proc. SPIE 7063, 70630S, San Diego, USA, August 2008.
  7. Yangjin Kim, Kenichi Hibino, Youichi Bitou, Sonko Osawa, and Mamoru Mitsuishi, “Measurement of the absolute optical thickness distribution of a transparent plate by a phase-shifting, wavelength tuning interferometry,” 21st International Commission for Optics, 238, Sydney, Australia, July 2008.
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